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CP12 全自動12英寸探針臺

項目

CP12探針臺

機臺尺寸

1620mm(W) *1230(D)*1450mm(H)

適用晶圓

200mm,300mm

晶圓厚度

250~2000μm

Die Size

350μm ~76,000μm

晶圓搬運方式

背面真空吸取,雙Arm

針測精度

XY:±1.5μm;Z:±2.5μm

XY平臺

重復定位精度±1μm

Z軸

重復定位精度±1.5μm,最大速度30mm/s

針測壓力

50kg(可選200kg)

校準方式

圖像校準,高低倍模板匹配

Index Time

240ms(基于Die Size 6mm,Z Clearance 0.5mm)

測試溫度

常溫~150℃±1℃

通訊接口

GPIB,預留TTL和RS232

可選功能

ID讀取,自動換卡

 

※主要針對CIS和SOC產品推出的高性價比探針臺

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