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AOI系統目錄當前位置:首頁  >>  產品展示

iFocus晶圓檢測系統

項目

iFocus

產品類型

EWLB/CMOS/MEMS/LED/LENS/GLASS WAFER/GAS WAFER/COG

進料方式

裸硅片或者繃環藍膜

硅片尺寸

5寸/6寸/8寸/12寸

多鏡頭配置(正面2D)

2.5X /5X /10X  可選配20X

燈光模組

3組獨立光源配置

辨識率

3.14um/1.57um/0.78um 每像素

檢測能力

2x2 像素

3D 相機

可選配

復判鏡頭(彩色)

傳輸手臂

日本高精度雙手臂模組

OCR/二維碼

支持

翹曲范圍

2毫米

檢測項目

晶圓表面劃傷檢測/RDL 斷路/凸起尺寸和高度檢測/殘膠/金屬殘留等

速度

8寸  檢查2D 在2.5X時 80片以上

8寸  檢查3D 40片以上

MTBA

6小時

MTBF

1000小時

潔凈度

Class 1000

內潔凈

設備尺寸

2x2.1x2.1m

版權所有:杭州長川科技股份有限公司 地址:杭州市濱江區聚才路410號

電話:+86-571-85096193 傳真:+86-571-88830180 技術支持:故鄉人網絡 浙ICP備13037257號-1

浙公網安備 33010802011471號

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